MEMS LITHOGRAPHY EQUIPMENT
Available from OAI
OAI manufactures precision lithography equipment for MEMS, Semiconductor,and Microfluidics that is used for protyping through production. Products include: front and backside mask aligners, UV light sources, process for making microfluidic devices, and meters for measuring the intensity of UV light. OAI's PV Test division manufactures Class AAA continuous and 1800nm Solar Simulators, I-V Testers and solar and flash power meters fpr measiring the irradiance of solar light. OAI prides itself on customer service and maintains offices world wide to provide engineering, application and field service.