OAI

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685 River Oaks Parkway
San Jose, CA 95134-1907
Phone: click for phone
About OAI
  • OAI design and manufactures precision lithography equipment and UV measurement insturmentation for MEMS, Nanotechnology, Microfluidics, and Semiconductor industries.
    Our products include front and backside mask aligners, UV exposure systems, UV measurment instruments, resisivity meters, Nanoimprint tool, and UV Ozone surface treatment systems for better adhesion and cleaning. OAI has sales service, and engineering support world wide.
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Products by OAI
  • MEMS LITHOGRAPHY EQUIPMENT

    OAI manufactures precision lithography equipment for MEMS, Semiconductor,and Microfluidics that is used for protyping through production. Products include: front and backside mask aligners, UV light sources, process for making microfluidic devices, and meters for measuring the intensity of UV... Read More
  • MEMS INNOVATIVE EQUIPMENT

    UV Exposure systems for all your lightography needs. Products are Fraont and backside mask aligners from bench top to production, UV Exposure systems for MEms and Microfluidics, and UV OZone Surface treatment. Read More
  • SEMICONDUCTOR LITHOGRAPHY SYSTEMS

    OAi is a global leader for over 35 years producing precsion lithography equipment for the Semiconductor Industry. Products range from table top mask aligners to automated mask aligners for production, UV light sources and edgebead exposure systems. OAI is also a global leader in Light... Read More